Fabrication of inverted pyramidal pits with Nano-opening by laser interference lithography and wet etching
| Autor: | Quan, Baogang, Yao, Zehan, Sun, Weijie, Liu, Zhe, Xia, Xiaoxiang, Gu, Changzhi, Li, Junjie |
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| Zdroj: | In Microelectronic Engineering 1 September 2016 163:110-114 |
| Databáze: | ScienceDirect |
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