Experimental study of polymer microlens fabrication using partial-filling hot embossing technique
| Autor: | Moore, Sean, Gomez, Juan, Lek, Devanda, You, Byoung Hee, Kim, Namwon, Song, In-Hyouk |
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| Zdroj: | In Microelectronic Engineering 16 August 2016 162:57-62 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect