Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization
| Autor: | Hantschel, T. a, ⁎, Tsigkourakos, M. a, Zha, L. a, Nuytten, T. a, Paredis, K. a, Majeed, Bivragh a, Vandervorst, W. a, b |
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| Zdroj: | In Microelectronic Engineering 15 June 2016 159:46-50 |
| Databáze: | ScienceDirect |
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