De-embedding techniques for nanoscale characterization of semiconductors by scanning microwave microscopy
| Autor: | Michalas, L., Brinciotti, E., Lucibello, A., Gramse, G., Joseph, C.H., Kienberger, F., Proietti, E., Marcelli, R. |
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| Zdroj: | In Microelectronic Engineering 15 June 2016 159:64-69 |
| Databáze: | ScienceDirect |
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