Residual-layer-free 3D nanoimprint using hybrid soft templates
| Autor: | Kolli, VijayRamya, Woidt, Carsten, Hillmer, Hartmut |
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| Zdroj: | In Microelectronic Engineering 5 January 2016 149:159-165 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Kolli, VijayRamya, Woidt, Carsten, Hillmer, Hartmut |
|---|---|
| Zdroj: | In Microelectronic Engineering 5 January 2016 149:159-165 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect