Phase analysis and thermal stability of thin films synthesized via solid state reaction of Ni with Si1 − xGex substrate

Autor: Peter, Antony Premkumar, Witters, Thomas, Dutta, Shibesh, Hikavvy, Andriy, Vaesen, Inge, Van Elshocht, Sven, Schaekers, Marc
Zdroj: In Microelectronic Engineering 5 January 2016 149:46-51
Databáze: ScienceDirect