Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges
| Autor: | Legrain, A., Berenschot, J.W., Tas, N.R., Abelmann, L. |
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| Zdroj: | In Microelectronic Engineering 1 June 2015 140:60-66 |
| Databáze: | ScienceDirect |
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| Autor: | Legrain, A., Berenschot, J.W., Tas, N.R., Abelmann, L. |
|---|---|
| Zdroj: | In Microelectronic Engineering 1 June 2015 140:60-66 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect