Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges
Autor: | Legrain, A., Berenschot, J.W., Tas, N.R., Abelmann, L. |
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Zdroj: | In Microelectronic Engineering 1 June 2015 140:60-66 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Legrain, A., Berenschot, J.W., Tas, N.R., Abelmann, L. |
---|---|
Zdroj: | In Microelectronic Engineering 1 June 2015 140:60-66 |
Databáze: | ScienceDirect |
Externí odkaz: |