Optical microscopy using a glass microsphere for metrology of sub-wavelength nanostructures
Autor: | Yang, Hui, Gijs, Martin A.M. |
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Zdroj: | In Microelectronic Engineering 1 August 2015 143:86-90 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Yang, Hui, Gijs, Martin A.M. |
---|---|
Zdroj: | In Microelectronic Engineering 1 August 2015 143:86-90 |
Databáze: | ScienceDirect |
Externí odkaz: |