Optical microscopy using a glass microsphere for metrology of sub-wavelength nanostructures
| Autor: | Yang, Hui, Gijs, Martin A.M. |
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| Zdroj: | In Microelectronic Engineering 1 August 2015 143:86-90 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Yang, Hui, Gijs, Martin A.M. |
|---|---|
| Zdroj: | In Microelectronic Engineering 1 August 2015 143:86-90 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect