SrTiOx for sub-20 nm DRAM technology nodes—Characterization and modeling
Autor: | Kaczer, B., Larcher, L., Vandelli, L., Reisinger, H., Popovici, M., Clima, S., Ji, Z., Joshi, S., Swerts, J., Redolfi, A., Afanas’ev, V.V., Jurczak, M. |
---|---|
Zdroj: | In Microelectronic Engineering 1 November 2015 147:126-129 |
Databáze: | ScienceDirect |
Externí odkaz: |