Three-dimensional fabrication of free-standing epitaxial semiconductor nanostructures obtained by focused ion beam
| Autor: | Giliberti, V., Sakat, E., Baldassarre, L., Di Gaspare, A., Notargiacomo, A., Giovine, E., Frigerio, J., Isella, G., Melli, M., Weber-Bargioni, A., Aloni, S., Sassolini, S., Cabrini, S., Biagioni, P., Ortolani, M., Bollani, M. |
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| Zdroj: | In Microelectronic Engineering 15 June 2015 141:168-172 |
| Databáze: | ScienceDirect |
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