Electrical impedance, electrochemistry, mechanical stiffness, and hardness tunability in glassy carbon MEMS μECoG electrodes
Autor: | Kassegne, Sam ⁎, Vomero, Maria, Gavuglio, Roberto, Hirabayashi, Mieko, Özyilmaz, Emre, Nguyen, Sebastien, Rodriguez, Jesus, Özyilmaz, Eda, van Niekerk, Pieter, Khosla, Ajit |
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Zdroj: | In Microelectronic Engineering 5 February 2015 133:36-44 |
Databáze: | ScienceDirect |
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