Electrical impedance, electrochemistry, mechanical stiffness, and hardness tunability in glassy carbon MEMS μECoG electrodes

Autor: Kassegne, Sam , Vomero, Maria, Gavuglio, Roberto, Hirabayashi, Mieko, Özyilmaz, Emre, Nguyen, Sebastien, Rodriguez, Jesus, Özyilmaz, Eda, van Niekerk, Pieter, Khosla, Ajit
Zdroj: In Microelectronic Engineering 5 February 2015 133:36-44
Databáze: ScienceDirect