CMOS–MEMS resonators: From devices to applications
Autor: | Uranga, A., Verd, J., Barniol, N. |
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Zdroj: | In Microelectronic Engineering 25 January 2015 132:58-73 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Uranga, A., Verd, J., Barniol, N. |
---|---|
Zdroj: | In Microelectronic Engineering 25 January 2015 132:58-73 |
Databáze: | ScienceDirect |
Externí odkaz: |