Reducing wrinkles and cracks of metal films on PDMS substrate by hexane extraction and oxygen plasma etching
| Autor: | Meng, Ying, Li, Zhen Bo, Chen, Xiang, Chen, Jia Pin |
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| Zdroj: | In Microelectronic Engineering 25 November 2014 130:8-12 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect