Comparative study of AlN dielectric films’ electrical properties for MEMS capacitive switches
| Autor: | Koutsoureli, M., Adikimenakis, A., Michalas, L., Papandreou, E., Stavrinidis, G., Konstantinidis, G., Georgakilas, A., Papaioannou, G. |
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| Zdroj: | In Microelectronic Engineering 25 November 2014 130:69-73 |
| Databáze: | ScienceDirect |
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