Phononic engineering of silicon using “dots on the fly” e-beam lithography and plasma etching
| Autor: | Lacatena, V., Haras, M., Robillard, J.-F., Monfray, S., Skotnicki, T., Dubois, E. |
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| Zdroj: | In Microelectronic Engineering 1 June 2014 121:131-134 |
| Databáze: | ScienceDirect |
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