A scalable anti-sticking layer process via controlled evaporation
| Autor: | Steinberg, Christian, Dhima, Khalid, Blenskens, Daniel, Mayer, Andre, Wang, Si, Papenheim, Marc, Scheer, Hella-Christin, Zajadacz, Joachim, Zimmer, Klaus |
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| Zdroj: | In Microelectronic Engineering 1 July 2014 123:4-8 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect