FIB patterning of dielectric, metallized and graphene membranes: A comparative study
| Autor: | Hemamouche, A., Morin, A., Bourhis, E., Toury, B., Tarnaud, E., Mathé, J., Guégan, P., Madouri, A., Lafosse, X., Ulysse, C., Guilet, S., Patriarche, G., Auvray, L., Montel, F., Wilmart, Q., Plaçais, B., Yates, J., Gierak, J. |
|---|---|
| Zdroj: | In Microelectronic Engineering 1 June 2014 121:87-91 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect