Temperature dependency of the kinetics of PureB CVD deposition over patterned Si/SiO2 surfaces
| Autor: | Mohammadi, V., Golshani, N., Mok, K.R.C., de Boer, W.B., Derakhshandeh, J., Nanver, L.K. |
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| Zdroj: | In Microelectronic Engineering 1 August 2014 125:45-50 |
| Databáze: | ScienceDirect |
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