In situ observation of Pt deposition process by using spectroscopic ellipsometry
| Autor: | Goto, Toshiaki, Watanabe, Mitsuhiro, Jin, Lianhua, Kondoh, Eiichi |
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| Zdroj: | In Microelectronic Engineering 1 June 2014 121:39-41 |
| Databáze: | ScienceDirect |
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