Monolithic integration of DUV-induced waveguides into plastic microfluidic chip for optical manipulation

Autor: Khoury, M., Vannahme, C., Sørensen, K.T., Kristensen, A., Berg-Sørensen, K.
Zdroj: In Microelectronic Engineering 1 June 2014 121:5-9
Databáze: ScienceDirect