Fabrication of a novel contact-enhanced horizontal sensitive inertial micro-switch with electroplating nickel
| Autor: | Chen, Wenguo, Wang, Yongliang, Zhang, Yonghua, Cheng, Ping, Wang, Yan, Ding, Guifu, Zhao, Xiaolin, Yang, Zhuoqing |
|---|---|
| Zdroj: | In Microelectronic Engineering 5 September 2014 127:21-27 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect