Fabrication of a novel contact-enhanced horizontal sensitive inertial micro-switch with electroplating nickel
Autor: | Chen, Wenguo, Wang, Yongliang, Zhang, Yonghua, Cheng, Ping, Wang, Yan, Ding, Guifu, Zhao, Xiaolin, Yang, Zhuoqing |
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Zdroj: | In Microelectronic Engineering 5 September 2014 127:21-27 |
Databáze: | ScienceDirect |
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