Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode
| Autor: | Kaleli, B., Nguyen, M.D., Schmitz, J., Wolters, R.A.M., Hueting, R.J.E. |
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| Zdroj: | In Microelectronic Engineering 1 May 2014 119:16-19 |
| Databáze: | ScienceDirect |
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| Autor: | Kaleli, B., Nguyen, M.D., Schmitz, J., Wolters, R.A.M., Hueting, R.J.E. |
|---|---|
| Zdroj: | In Microelectronic Engineering 1 May 2014 119:16-19 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect