Buried triple-gate structures for advanced field-effect transistor devices
| Autor: | Müller, M.R., Gumprich, A., Schütte, F., Kallis, K., Künzelmann, U., Engels, S., Stampfer, C., Wilck, N., Knoch, J. |
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| Zdroj: | In Microelectronic Engineering 1 May 2014 119:95-99 |
| Databáze: | ScienceDirect |
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