Sub-10 nm patterning by focused He-ion beam milling for fabrication of downscaled graphene nano devices
| Autor: | Kalhor, Nima, Boden, Stuart A., Mizuta, Hiroshi |
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| Zdroj: | In Microelectronic Engineering February 2014 114:70-77 |
| Databáze: | ScienceDirect |
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