Low temperature chemical vapour synthesis of Cu3Ge thin films for interconnect applications
| Autor: | Antony Premkumar, P., Carbonell, L., Schaekers, M., Opsomer, K., Adelmann, C., Richard, O., Bender, H., Franquet, A., Meersschaut, J., Wen, L., Zsolt, T., Van Elshocht, S. |
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| Zdroj: | In Microelectronic Engineering 25 May 2014 120:246-250 |
| Databáze: | ScienceDirect |
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