Increased efficiency of direct nanoimprinting on planar and curved bulk titanium through surface modification
Autor: | Greer, Andrew I.M., Seunarine, Krishna, Khokhar, Ali Z., MacLaren, Ian, Brydone, Alistair S., Moran, David A.J., Gadegaard, Nikolaj |
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Zdroj: | In Microelectronic Engineering December 2013 112:67-73 |
Databáze: | ScienceDirect |
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