Increased efficiency of direct nanoimprinting on planar and curved bulk titanium through surface modification

Autor: Greer, Andrew I.M., Seunarine, Krishna, Khokhar, Ali Z., MacLaren, Ian, Brydone, Alistair S., Moran, David A.J., Gadegaard, Nikolaj
Zdroj: In Microelectronic Engineering December 2013 112:67-73
Databáze: ScienceDirect