Sheet resistance measurement on AlGaN/GaN wafers and dispersion study
| Autor: | Lehmann, J., Leroux, C., Charles, M., Torres, A., Morvan, E., Blachier, D., Ghibaudo, G., Bano, E., Reimbold, G. |
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| Zdroj: | In Microelectronic Engineering September 2013 109:334-337 |
| Databáze: | ScienceDirect |
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