Effect of TSV density on local stress concentration: Micro-Raman spectroscopy measurement and Finite Element Analysis
| Autor: | Le Texier, F., Mazuir, J., Su, M., Castagné, L., Souriau, J.-C., Liotard, J.-L., Saadaoui, M., Inal, K. |
|---|---|
| Zdroj: | In Microelectronic Engineering June 2013 106:139-143 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect