Novel encapsulated ITO/arc-ZnO:TiO2 antireflective passivating layer for TCO conducting substrate prepared by simultaneous radio frequency-magnetron sputtering

Autor:	Abdullah, M.H., Ismail, L.N., Mamat, M.H., Musa, M.Z., Rusop, M.
Zdroj:	In Microelectronic Engineering August 2013 108:138-144
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect