Control of self-assembly defects in thermal nanoimprint
Autor: | Mayer, Andre, Papenheim, Marc, Möllenbeck, Saskia, Dhima, Khalid, Wang, Si, Scheer, Hella-Christin |
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Zdroj: | In Microelectronic Engineering October 2013 110:80-84 |
Databáze: | ScienceDirect |
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