Copper pillar interconnect capability for mmwave applications in 3D integration technology
Autor: | Joblot, S., Bar, P., Sibuet, H., Ferrandon, C., Reig, B., Jan, S., Arnaud, C., Lamy, Y., Coudrain, P., Coffy, R., Boillon, O., Carpentier, J.F. |
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Zdroj: | In Microelectronic Engineering July 2013 107:72-79 |
Databáze: | ScienceDirect |
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