Chemisorption of ALD precursors in and on porous low-k films
| Autor: | Verdonck, P., Delabie, A., Swerts, J., Farrell, L., Baklanov, M.R., Tielens, H., Van Besien, E., Witters, T., Nyns, L., Van Elshocht, S. |
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| Zdroj: | In Microelectronic Engineering June 2013 106:81-84 |
| Databáze: | ScienceDirect |
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