New method to evaluate materials outgassing used in MEMS thin film packaging technology
| Autor: | Savornin, B., Baillin, X., Blanquet, E., Nuta, I., Saint Patrice, D., Nicolas, P., Charvet, P.L., Pornin, J.L. |
|---|---|
| Zdroj: | In Microelectronic Engineering July 2013 107:97-100 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect