Single-step 3D nanolithography using plasma polymerized hexane films

Autor:	Pedersen, Rasmus H., Kustanovich, Kiryl, Gadegaard, Nikolaj
Zdroj:	In Microelectronic Engineering October 2012 98:167-170
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect