Highly inorganic titania based sol–gel as directly patternable resist for micro- and nano- structured surfaces
| Autor: | Zanchetta, E., Auzelyte, V., Brugger, J., Savegnago, A.V., Della Giustina, G., Brusatin, G. |
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| Zdroj: | In Microelectronic Engineering October 2012 98:176-179 |
| Databáze: | ScienceDirect |
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