Integration of rotated 3-D structures into pre-patterned PMMA substrate using step & stamp nanoimprint lithography
| Autor: | Haatainen, T., Mäkelä, T., Schleunitz, A., Grenci, G., Tormen, M. |
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| Zdroj: | In Microelectronic Engineering October 2012 98:180-183 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect