Impact of O2-based plasma strip chemistries on the electrochemical behavior of TiN electrodes for biomedical applications
| Autor: | Collaert, N., Mannaert, G., Paraschiv, V., Goossens, D., Demand, M., Eberle, W. |
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| Zdroj: | In Microelectronic Engineering November 2012 99:6-10 |
| Databáze: | ScienceDirect |
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