Effect of retaining ring slot designs and polishing conditions on slurry flow dynamics at bow wave
| Autor: | Liao, X., Sampurno, Y., Zhuang, Y., Rice, A., Sudargho, F., Philipossian, A., Wargo, C. |
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| Zdroj: | In Microelectronic Engineering October 2012 98:70-73 |
| Databáze: | ScienceDirect |
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