Cancellation of the parasitic feedthrough current in an integrated CMOS–MEMS clamped-clamped beam resonator
| Autor: | Giner, Joan, Uranga, Arantxa, Marigò, Eloi, Muñoz-Gamarra, Jose Luis, Colinet, Eric, Barniol, Nuria, Arcamone, Julien |
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| Zdroj: | In Microelectronic Engineering October 2012 98:599-602 |
| Databáze: | ScienceDirect |
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