Scatterometry analysis of sequentially imprinted patterns: Influence of thermal parameters
| Autor: | Gourgon, C., Ferchichi, A.K., Pietroy, D., Haatainen, T., Tesseire, J. |
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| Zdroj: | In Microelectronic Engineering October 2012 98:270-274 |
| Databáze: | ScienceDirect |
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