Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
| Autor: | Schmitt, H., Duempelmann, P., Fader, R., Rommel, M., Bauer, A.J., Frey, L., Brehm, M., Kraft, A. |
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| Zdroj: | In Microelectronic Engineering October 2012 98:275-278 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect