Fabrication of MOSFETs by 3D soft UV-nanoimprint
| Autor: | Koo, Namil, Schmidt, Mathias, Mollenhauer, Thomas, Moormann, Christian, Schlachter, Florian, Kurz, Heinrich |
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| Zdroj: | In Microelectronic Engineering September 2012 97:85-88 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect