Nanostructured silicon for Ge nanoheteroepitaxy
Autor: | Bauer, J., Yamamoto, Y., Zaumseil, P., Fursenko, O., Schulz, K., Kozlowski, G., Schubert, M.A., Schroeder, T., Tillack, B. |
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Zdroj: | In Microelectronic Engineering September 2012 97:169-172 |
Databáze: | ScienceDirect |
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