Nanostructured silicon for Ge nanoheteroepitaxy

Autor: Bauer, J., Yamamoto, Y., Zaumseil, P., Fursenko, O., Schulz, K., Kozlowski, G., Schubert, M.A., Schroeder, T., Tillack, B.
Zdroj: In Microelectronic Engineering September 2012 97:169-172
Databáze: ScienceDirect