Fabrication process development for a high sensitive electrochemical IDA sensor
| Autor: | Partel, S., Mayer, M., Hudek, P., Dinçer, C., Kieninger, J., Urban, G.A., Motzek, K., Matay, L. |
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| Zdroj: | In Microelectronic Engineering September 2012 97:235-240 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect