Beam induced deposition of 3D electrodes to improve coupling to cells
| Autor: | Martiradonna, Luigi, Quarta, Luca, Sileo, Leonardo, Schertel, Andreas, Maccione, Alessandro, Simi, Alessandro, Dante, Silvia, Scarpellini, Alice, Berdondini, Luca, De Vittorio, Massimo |
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| Zdroj: | In Microelectronic Engineering September 2012 97:365-368 |
| Databáze: | ScienceDirect |
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