High mobility CMOS transistors on Si/SiGe heterostructure channels
| Autor: | Oh, Jungwoo, Jeon, Kanghoon, Lee, Se-Hoon, Huang, Jeff, Hung, P.Y., Ok, Injo, Sassman, Barry, Ko, Dae-Hong, Kirsch, Paul, Jammy, Raj |
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| Zdroj: | In Microelectronic Engineering September 2012 97:26-28 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect