Contacts on high aspect ratio 3D structures
| Autor: | Neumann, R., Al-Suleiman, M., Erenburg, M., Ledig, J., Wehmann, H.-H., Waag, A. |
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| Zdroj: | In Microelectronic Engineering 2011 88(11):3224-3226 |
| Databáze: | ScienceDirect |
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| Autor: | Neumann, R., Al-Suleiman, M., Erenburg, M., Ledig, J., Wehmann, H.-H., Waag, A. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2011 88(11):3224-3226 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect