Direct reproduction of 3D microstructures using a hybrid approach; by creation of master-patterns and metallic molds for embossing
| Autor: | Bae, Kong Myeong a, Ko, Jong Soo a, Lim, Tae Woo b, Yang, Dong-Yol b, Shin, Bo Sung c, Lee, Hee Soo d, Park, Sang Hu a, ⁎ |
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| Zdroj: | In Microelectronic Engineering 2011 88(11):3300-3305 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect