Organized porous alumina membranes for high density silicon nanowires growth
| Autor: | Bernardin, T., Dupré, L., Burnier, L., Gentile, P., Peyrade, D., Zelsmann, M., Buttard, D. |
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| Zdroj: | In Microelectronic Engineering 2011 88(9):2844-2847 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect